MSE 2016 - Full Program

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Highlight Lecture

Determination of growth quality of thin films by In-situ GISAXS during the deposition process

Wednesday (28.09.2016)
09:45 - 10:00
Part of:

We present how the growth of thin films can be investigated during the deposition by means of grazing incidence small angle X-ray scattering (GISAXS). These experiments are typically done only at synchrotrons.

They are now also feasable in the home-lab by using modern microfocus sources like the air cooled IµS. A lot of information can be obtained with this technique during the deposition of thin films.

The Incoatec microfocus source IµS is a low power air cooled X-ray source for diffractometry applications and is available with Cr, Co, Cu, Mo, and Ag anodes. The source is equipped with a two dimensional beam shaping multilayer optics. Therefore, we can form either a highly collimated beam with a low divergence (below 0.5 mrad) or a focusing beam with higher divergence (up to 10 mrad) and very small focal spots (diameter below 100 µm).

In our presentation we give an overview of experiments and results demonstrating the potential of the IµS in in-situ GISAXS studies. We present 2 applications in detail:

1) Multilayers deposited by ion beam assisted deposition: This experiment was done only at synchrotrons. With an IµS it becomes feasible in the home-lab.

2) Growth of thin metallic layers on graphene: The difference between production by PVD and Thermal Deposition is discussed.


Dr. Jörg Wiesmann
Incoatec GmbH
Additional Authors:
  • Dr. Jürgen Graf
    Incoatec GmbH
  • Andreas Stricker
    Incoatec GmbH
  • Dr. Karol Vegso
    Slovak Academy of Science
  • Martin Hodas
    Slovak Academy of Science
  • Dr. Peter Siffalovic
    Slovak Academy of Science