MSE 2016 - Full Program

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Lecture

A flexible method for the preparation of thin film samples for in situ mechanical testing in the TEM

Wednesday (28.09.2016)
10:15 - 10:30
Part of:


A novel method was developed for the preparation of thin film micro-tensile specimens, which enables the target preparation and mechanical testing of individual microstructural defects. It is based on a combination of focused ion beam (FIB) milling and electron-beam-assisted etching with xenon difluoride precursor gas. In contrast to existing FIB-based preparation approaches, the area of interest is never exposed to ion beam irradiation and a pristine microstructure is preserved. This is achieved by the use of a special shadow milling geometry with a thin silicon membrane simultaneously serving as a substrate and protective layer for the thin film of interest.

The method was applied to prepare sub-micron sized tensile specimens from nanotwinned Cu-Al thin films, which were tested in situ in the TEM. Loading of the specimens was performed by a TEM Nanoindenter combined with a Push-to-Pull conversion device.

Depending on the relative orientation of the twin lamellae to the tensile direction, different deformation modes were observed, which will be discussed in the presentation.

 

Speaker:
M. Sc. Jan Philipp Liebig
Friedrich-Alexander-University Erlangen-Nuremberg
Additional Authors:
  • Prof. Dr. Mathias Göken
    University of Erlangen-Nuremberg
  • Dr. Benoit Merle
    University of Erlangen-Nuremberg